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Название: Electromechanics and MEMS
Автор: Thomas B. Jones and Nenad G. Nenadic
Издательство: Cambridge University Press
Год: 2013
Формат: PDF
Размер: 15 Мб
Язык: английский / English
Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts.
Автор: Thomas B. Jones and Nenad G. Nenadic
Издательство: Cambridge University Press
Год: 2013
Формат: PDF
Размер: 15 Мб
Язык: английский / English
Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts.