- Добавил: harun54
- Дата: 14-06-2019, 18:42
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Автор: Mahmoud Rasras, Ibrahim (Abe) M Elfadel, Ha Duong Ngo
Издательство: Mdpi AG
Год: 2019
Формат: PDF
Размер: 36 Мб
Язык: английский / English
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing.