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Автор: Paolo Di Barba, Slawomir Wiak
Издательство: Springer
Год: 2020
Формат: true pdf/epub
Страниц: 191
Размер: 22.7 Mb
Язык: English
This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.