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Название: Plasmonic MEMS
Автор: John X. J. Zhang
Издательство: Springer
Год: 2023
Страниц: 196
Язык: английский
Формат: pdf (true)
Размер: 10.2 MB
This book covers key topics in the emerging field of plasmonic MEMS, with an emphasis on practical aspects. Although readers can find many comprehensive textbooks on electromagnetic waves, nanophotonics and plasmonics, most of these lack the focus needed for a thorough grasp of plasmonic micromachining and MEMS. Micro-Electro-Mechanical Systems (MEMS) is the technology of integrated mechanical and electro-mechanical micro-elements on a single chip. The micro-scale moving components of MEMS devices can be readily and robustly fabricated using the well-developed micro/nano fabrication techniques. Mechanical displacement in MEMS devices can be obtained via external electrical actuation. MEMS technology aims to revolutionize nearly every product group by substituting sensors, actuators, detectors, and gears with micrometer-scale equivalents. One of the main reasons for the development of MEMS technology in recent years, is the drastic reduction of the size of the device components along with the additional and complemented mechanical modulation functionality which can enable tunable on-chip sensors and actuators. MEMS can provide microstructures in a variety of desirable shapes and sizes with critical future size of micro or nano meter along with significant mechanical tunability.
Автор: John X. J. Zhang
Издательство: Springer
Год: 2023
Страниц: 196
Язык: английский
Формат: pdf (true)
Размер: 10.2 MB
This book covers key topics in the emerging field of plasmonic MEMS, with an emphasis on practical aspects. Although readers can find many comprehensive textbooks on electromagnetic waves, nanophotonics and plasmonics, most of these lack the focus needed for a thorough grasp of plasmonic micromachining and MEMS. Micro-Electro-Mechanical Systems (MEMS) is the technology of integrated mechanical and electro-mechanical micro-elements on a single chip. The micro-scale moving components of MEMS devices can be readily and robustly fabricated using the well-developed micro/nano fabrication techniques. Mechanical displacement in MEMS devices can be obtained via external electrical actuation. MEMS technology aims to revolutionize nearly every product group by substituting sensors, actuators, detectors, and gears with micrometer-scale equivalents. One of the main reasons for the development of MEMS technology in recent years, is the drastic reduction of the size of the device components along with the additional and complemented mechanical modulation functionality which can enable tunable on-chip sensors and actuators. MEMS can provide microstructures in a variety of desirable shapes and sizes with critical future size of micro or nano meter along with significant mechanical tunability.