Название: Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Автор: Huiliang Cao
Издательство: Springer/National Defense Industry Press
Год: 2023
Страниц: 231
Язык: английский
Формат: pdf (true)
Размер: 10.7 MB
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes. Micro electro mechanical system (MEMS) gyroscope is an important application of MEMS technology in inertia type instruments. It has the advantages of small volume, light weight, low cost, mass production and good impact resistances. It has important practical value and wide application prospect in national economy and national defense and military fields.