Название: FinFET Devices for VLSI Circuits and Systems
Автор: Samar K. Saha
Издательство: CRC Press
Год: 2020
Формат: True PDF
Страниц: 336
Размер: 19.9 Mb
Язык: English

To surmount the continuous scaling challenges of MOSFET devices, FinFETs have emerged as the real alternative for use as the next generation device for IC fabrication technology. The objective of this book is to provide the basic theory and operating principles of FinFET devices and technology, an overview of FinFET device architecture and manufacturing processes, and detailed formulation of FinFET electrostatic and dynamic device characteristics for IC design and manufacturing. Thus, this book caters to practicing engineers transitioning to FinFET technology and prepares the next generation of device engineers and academic experts on mainstream device technology at the nanometer-nodes.