Название: Flash Lamp Annealing: From Basics to Applications (Springer Series in Materials Science)
Автор: Lars Rebohle, Slawomir Prucnal, Denise Reichel
Издательство: Springer
Год: 2019
Формат: true pdf/epub
Страниц: 288
Размер: 50.8 Mb
Язык: English

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.